Lifetime improvement of nitrided carbon stripper foils by ion-beam sputtering with a binary gas mixture

✍ Scribed by I. Sugai; Y. Takeda; M. Oyaizu; H. Kawakami; Y. Hattori; K. Kawasaki; K. Yoshida; A. Itoh

• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 231 KB
• Volume: 521
• Category: Article
• ISSN: 0168-9002
• DOI: 10.1016/j.nima.2003.11.150