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Influence of annealing on interfaces of MOS structures with RTO oxides

✍ Scribed by Sharad Prasad; Rüdiger Ferretti

Book ID: 107925766
Publisher: Elsevier Science
Year: 1989
Tongue: English
Weight: 234 KB
Volume: 39
Category: Article
ISSN: 0169-4332
DOI: 10.1016/0169-4332(89)90449-2

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