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Influence of an initial (contamination) film on the determination of film properties by ellipsometry

✍ Scribed by Kucirek, Jan; Melmed, Allan J.

Book ID: 115383757
Publisher: Optical Society of America
Year: 1975
Weight: 256 KB
Volume: 65
Category: Article
ISSN: 0030-3941
DOI: 10.1364/JOSA.65.000611

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