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Influence of Al-doping on electroluminescence of silicon-based films

โœ Scribed by Wu Xuemei; Ye Chunnuan; Zhuge Lanjian; Dong Yemin; Tang Naiyun; Yu Yuehui; Ning Zhaoyuan; Yao Weiguo

Publisher
Springer
Year
2001
Tongue
English
Weight
394 KB
Volume
46
Category
Article
ISSN
1001-6538

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## Abstract A series of hydrogenated silicon (Si:H) thin films of about 350 nm in thickness were fabricated on K9 glass substrate by plasma enhanced chemical vapor deposition. The transition between hydrogenated amorphous silicon (aโ€Si:H) and microcrystalline hydrogenated silicon (ฮผcโ€Si:H) was char