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Influence of Al and Si content on structure and mechanical properties of arc evaporated Al–Cr–Si–N thin films

✍ Scribed by Tritremmel, C.; Daniel, R.; Lechthaler, M.; Polcik, P.; Mitterer, C.

Book ID
121462915
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
892 KB
Volume
534
Category
Article
ISSN
0040-6090

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✍ J. Soldán; J. Neidhardt; B. Sartory; R. Kaindl; R. Čerstvý; P.H. Mayrhofer; R. T 📂 Article 📅 2008 🏛 Elsevier Science 🌐 English ⚖ 841 KB

The addition of silicon to the widely used aluminum-containing transition metal nitrides is promising for the synthesis of hard and thermally stable films with good oxidation resistance. For that reason, Al-Cr-Si-N coatings were deposited by reactive cathodic arc-evaporation under industrial conditi