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Effect of Si content on the microstructure and mechanical properties of Mo–Al–Si–N coatings

✍ Scribed by J.F. Yang; B. Prakash; Y. Jiang; X.P. Wang; Q.F. Fang

Book ID
116965179
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
628 KB
Volume
86
Category
Article
ISSN
0042-207X

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✍ Z.G. Yuan; J.F. Yang; X.P. Wang; Q.F. Fang 📂 Article 📅 2010 🏛 Elsevier Science 🌐 English ⚖ 642 KB

Mo-Al-Si-N films were deposited by reactive magnetron sputtering on substrates of Si wafer, alumina, and stainless steel from composite targets consisting of Mo, Al and Si. To investigate the effect of Al content on the properties of the Mo-Al-Si-N films at a constant Si content of 9 at.%, the chemi