Influence of a lift hole-equipped pin chuck on wafer flatness

✍ Scribed by Atsunobu Une; Nagahisa Ogasawara; Tetsuo Fukuda; Masanori Yoshise; Ping Xin

• Publisher: Elsevier Science
• Year: 2009
• Tongue: English
• Weight: 599 KB
• Volume: 86
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2009.01.079