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Influence of a d.c. substrate bias on the resistivity, composition, crystallite size and microstrain of WTi and WTi-N films

✍ Scribed by H. Ramarotafika; G. Lemperiere

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 716 KB
Volume: 266
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(96)80032-0

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