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Influence of 5-atom rings on the optical properties of amorphous carbon nitride

โœ Scribed by R.M. Valladares; Alipio G. Calles; Ariel A. Valladares


Book ID
117542456
Publisher
Elsevier Science
Year
1999
Tongue
English
Weight
215 KB
Volume
103
Category
Article
ISSN
0379-6779

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Amorphous carbon nitride thin films were deposited on polymer substrates using radio frequency (rf) plasma in a mixture of nitrogen (N 2 ) and acetylene (C 2 H 2 ) gasses. The samples were prepared at different rf plasma power (350, 400, 450, 500, and 550 W), at constant plasma exposure time of 10 m