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Influence exerted by the plasma edge potential on recycling, sputtering and impurity accumulation

✍ Scribed by L. Oren; L. Keller; F. Schwirzke; S. Talmadge; R.J. Taylor

Book ID: 103214899
Publisher: Elsevier Science
Year: 1982
Tongue: English
Weight: 402 KB
Volume: 111-112
Category: Article
ISSN: 0022-3115
DOI: 10.1016/0022-3115(82)90177-5

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