Indium-tin oxide deposition by d.c. reactive sputtering on a low softening point material

✍ Scribed by A. Kawada

• Publisher: Elsevier Science
• Year: 1990
• Tongue: English
• Weight: 806 KB
• Volume: 191
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(90)90381-m