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Indium oxide thin film sensors for ozone monitoring produced by a sol-gel method

โœ Scribed by Wan-Young Chung; Yun-Su Lee; Duk-Dong Lee


Book ID
111542064
Publisher
Springer
Year
2003
Tongue
English
Weight
326 KB
Volume
22
Category
Article
ISSN
0261-8028

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## Abstract Zinc oxide thin films have been prepared by the solโ€“gel method from a 2โ€methoxyethanol solution of zinc acetate dihydrate on SiO~2~ substrates using air, pure oxygen, and 1% ozone in oxygen as oxygen source. In the cases where air or oxygen was used as the oxygen source for thermal anne