Preparation of ZnO thin film by the sol-
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Ehara, Takashi ;Ueno, Takaaki ;Abe, Junya
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Article
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2010
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John Wiley and Sons
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English
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## Abstract Zinc oxide thin films have been prepared by the solโgel method from a 2โmethoxyethanol solution of zinc acetate dihydrate on SiO~2~ substrates using air, pure oxygen, and 1% ozone in oxygen as oxygen source. In the cases where air or oxygen was used as the oxygen source for thermal anne