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Indium and aluminium-doped ZnO thin films deposited onto FTO substrates: nanostructure, optical, photoluminescence and electrical properties

✍ Scribed by M. Benhaliliba; C. E. Benouis; M. S. Aida; F. Yakuphanoglu; A. Sanchez Juarez

Book ID
106443502
Publisher
Springer
Year
2010
Tongue
English
Weight
645 KB
Volume
55
Category
Article
ISSN
0928-0707

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## Abstract ZnO thin films were deposited onto flexible Poly‐Ethylene Terephthalate and Poly‐Ethylene Naphthalate substrates in an ultra‐high vacuum chamber by Pulsed DC Magnetron Sputtering. The process took place at room temperature and in argon atmosphere with fixed pressure, by applying two dif