✦ LIBER ✦

Independent control of microwave power and substrate temperature in chemical vapour deposition diamond synthesis

✍ Scribed by H. Hirai; Y. Yazaki; O. Fukunaga

Publisher: Springer
Year: 1991
Tongue: English
Weight: 523 KB
Volume: 10
Category: Article
ISSN: 0261-8028
DOI: 10.1007/bf00719699

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Microwave and hot filament chemical vapo

Microwave and hot filament chemical vapour deposition of diamond multilayers on Si and WC–Co substrates

✍ M. Kadlečíková; M. Vojs; J. Breza; M. Veselý; Z. Frgala; M. Michalka; J. Matějko 📂 Article 📅 2007 🏛 Elsevier Science 🌐 English ⚖ 796 KB

A serious problem in the use of chemical-vapour-deposited polycrystalline diamond coatings in electronics, optics as well as in cutting tools is the high surface roughness. In our work, microcrystalline and nanocrystalline diamond films with a thickness of 0.5-5 mm were deposited using microwave che

Synthesis of SiC nanofibers by microwave

Synthesis of SiC nanofibers by microwave plasma assisted chemical vapour deposition in CH4/H2gas mixture

✍ Rizk, S. ;Assouar, M. B. ;Belmahi, M. ;Le Brizoual, L. ;Bougdira, J. 📂 Article 📅 2007 🏛 John Wiley and Sons 🌐 English ⚖ 510 KB

## Abstract We report in this study, the growth of silicon carbide nanofibers on silicon substrates covered by Fe thin film catalyst using microwave plasma assisted chemical vapour deposition. The silicon source is the substrate itself. The growth morphology, microstructure, and defects on SiC nano