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Indentation method to measure the residual stress induced by ion implantation

✍ Scribed by Q. Wang; K. Ozaki; H. Ishikawa; S. Nakano; H. Ogiso

Publisher: Elsevier Science
Year: 2006
Tongue: English
Weight: 343 KB
Volume: 242
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2005.08.008

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