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Increase of breakdown voltage due to composite insulation in SF6 gas

โœ Scribed by Tetsuo Yoshida; Masaru Miyagawa; Iwao Ohshima; Nobuo Masaki; Satoru Yanabu


Book ID
112081765
Publisher
John Wiley and Sons
Year
1991
Tongue
English
Weight
893 KB
Volume
111
Category
Article
ISSN
0424-7760

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ArF excimer laser radiation on Si surface at controlled SF 6 atmosphere creates a microstructure whose alteration at various UV doses and SF 6 pressures are investigated in this work. Moreover, a rigorous model has been presented here regarding the experiments based on the micro-fluid mechanical pro