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Incorporation of nitrogen in sputtered carbon films

✍ Scribed by N. Axén; G.A. Botton; H.Q. Lou; R.E. Somekh; I.M. Hutchings


Book ID
107930447
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
785 KB
Volume
81
Category
Article
ISSN
0257-8972

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