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Incipient amorphous-to-crystalline transition in HfO2 as a function of thickness scaling and anneal temperature

✍ Scribed by Patrick S. Lysaght; Joseph C. Woicik; M. Alper Sahiner; Byoung-Hun Lee; Raj Jammy

Book ID: 116670718
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 156 KB
Volume: 354
Category: Article
ISSN: 0022-3093
DOI: 10.1016/j.jnoncrysol.2007.07.050

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