Tin oxide micro gas sensor for detecting
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Hyeon Soo Park; Hyun Woo Shin; Dong Hyun Yun; Hyung-Ki Hong; Chul Han Kwon; Kyuc
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Article
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1995
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Elsevier Science
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English
โ 468 KB
Highly sensitive and mechanically stable micro gas sensors have been made using microfabrication and micromachining techniques. The sensing material used to detect offensive CHsSH gas is 1 wt.% Pd-doped, 2000 A thick SnOz deposited by r.f. magnetron sputtering. The optimum operating temperature of t