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In situion etching in a scanning electron microscope

✍ Scribed by Udo Höweler; Martin Klessinger


Publisher
Springer
Year
1977
Tongue
English
Weight
922 KB
Volume
12
Category
Article
ISSN
0022-2461

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Liquid-helium stage in a scanning electr
✍ P.L. Stöhr; R.P. Huebener 📂 Article 📅 1979 🏛 Elsevier Science 🌐 English ⚖ 193 KB

A liquid-helium stage to be inserted into a scanning electron microscope (SEM) is described. The sample chamber, which is filled with liquid helium, has a volume of about 8 x 7 x 5 cm 3 Translation of the cooled sample in x, y, and z directions is possible during electron-optical observation. Since