𝔖 Bobbio Scriptorium
✦   LIBER   ✦

In-Situ Studies of ALD Growth of Hafnium Oxide Films

✍ Scribed by Konstantin Karavaev; Krzysztof Kolanek; Massimo Tallarida; Dieter Schmeißer; Ehrenfried Zschech

Publisher
John Wiley and Sons
Year
2009
Tongue
English
Weight
420 KB
Volume
11
Category
Article
ISSN
1438-1656

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

In situ growth and characterization of u
In situ growth and characterization of ultrahard thin films
✍ Bengu, E.; Collazo-Davila, C.; Grozea, D.; Landree, E.; Widlow, I.; Guruz, M.; M 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 459 KB 👁 2 views

Results concerning the operation of a new ultrahigh vacuum (UHV) ion-beam assisted deposition system for in situ investigation of ultrahard thin films are reported. A molecular beam epitaxy (MBE) chamber attached to a surface science system (SPEAR) has been redesigned for deposition of cubic-boron n

RBS study of in situ grown BiSrCaCuO fil
RBS study of in situ grown BiSrCaCuO films
✍ L. Ranno; J. Perrière; J.P. Enard; F. Kerhervé; A. Laurent; R. Perez Casero 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 407 KB