In situ spectroscopic ellipsometry of MOCVD-grown GaN compounds for on-line composition determination and growth control

✍ Scribed by A. Bonanni; D. Stifter; A. Montaigne-Ramil; K. Schmidegg; K. Hingerl; H. Sitter

• Book ID: 108341748
• Publisher: Elsevier Science
• Year: 2003
• Tongue: English
• Weight: 144 KB
• Volume: 248
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/s0022-0248(02)01863-8