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In situ simultaneous radio frequency discharge power measurements

✍ Scribed by Godyak, V. A.

Book ID: 121833904
Publisher: AVS (American Vacuum Society)
Year: 1990
Tongue: English
Weight: 593 KB
Volume: 8
Category: Article
ISSN: 0734-2101
DOI: 10.1116/1.576457

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