Heat flux into the substrate and electric power measurement in radio frequency discharge plasma

✍ Scribed by Kenichiro Hachiya; Kentaro Ebe; Syouji Kato; Seiji Mukaigawa; Koichi Takaki; Tamiya Fujiwara

• Publisher: John Wiley and Sons
• Year: 2006
• Tongue: English
• Weight: 480 KB
• Volume: 155
• Category: Article
• ISSN: 0424-7760
• DOI: 10.1002/eej.20295