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In situ pattern formation of GaAs by electron-beam-stimulated oxidation and subsequent Cl2 gas etching

✍ Scribed by Y. Sugimoto; M. Taneya; K. Akita; H. Kawanishi

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 316 KB
Volume: 13
Category: Article
ISSN: 0167-9317
DOI: 10.1016/0167-9317(91)90121-s

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