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In situ monitoring by soft X-ray spectrometry of amorphous carbon plasma deposition

✍ Scribed by P.B. Legrand; J.P. Dauchot; M. Hecq


Book ID
103428453
Publisher
Elsevier Science
Year
1994
Tongue
English
Weight
327 KB
Volume
241
Category
Article
ISSN
0040-6090

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