✦ LIBER ✦
Fluorine incorporation into amorphous hydrogenated carbon films deposited by plasma-enhanced chemical vapor deposition: structural modifications investigated by X-ray photoelectron spectrometry and Raman spectroscopy
✍ Scribed by da Costa, M.E.H.Maia; Freire, F.L; Jacobsohn, L.G; Franceschini, D; Mariotto, G; Baumvol, I.R.J
- Book ID
- 123519190
- Publisher
- Elsevier Science
- Year
- 2001
- Tongue
- English
- Weight
- 109 KB
- Volume
- 10
- Category
- Article
- ISSN
- 0925-9635
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