In-situ monitoring and control of hydrogenated amorphous silicon–germanium band-gap profiling during plasma deposition process

✍ Scribed by Moon, Se Youn; You, D.J.; Lee, S.E.; Lee, Heonmin

• Book ID: 122769041
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 491 KB
• Volume: 13
• Category: Article
• ISSN: 1567-1739
• DOI: 10.1016/j.cap.2013.05.005