In-situ HEED structure analysis of AlNxfilms grown by the simultaneous use of a radical beam source and ICB technique

✍ Scribed by A. Richthofen; D. Neuschütz

• Book ID: 112291938
• Publisher: Springer
• Year: 1994
• Tongue: English
• Weight: 560 KB
• Volume: 349
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00323237