Design and characterization of a metal-ion beam and nitrogen-radical beam source PVD system with in-situ AES constitution and HEED structure analysis

✍ Scribed by Alexander von von Richthofen

• Book ID: 113022429
• Publisher: Springer
• Year: 1996
• Tongue: English
• Weight: 174 KB
• Volume: 355
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/s0021663550543