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In-situ formation of local inhomogeneities in semiconductors

โœ Scribed by M. Klingler; W. F. Chu; W. Weppner

Publisher
Springer-Verlag
Year
1997
Tongue
English
Weight
597 KB
Volume
3
Category
Article
ISSN
0947-7047

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โœ L.R. Harriott ๐Ÿ“‚ Article ๐Ÿ“… 1992 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 955 KB

The processing of semiconductor devices within a high vacuum or controlled ambient environment has received much attention over the past few years. The motivations for in situ processing include avoidance of contamination or oxidation in the atmosphere, improved device yields, and process simplifica