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In situ endpoint detection of reactive ion-beam etching of dielectric gratings with an etch-stop layer using downstream mass spectrometry

✍ Scribed by Xiangfeng Meng; Lifeng Li

Book ID: 104002360
Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 643 KB
Volume: 254
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2008.02.096

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📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 143 KB