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In-situ determination of photoresist glass transition temperature by wafer curvature measurement techniques

โœ Scribed by A. Schiltz; P.J. Paniez


Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
312 KB
Volume
27
Category
Article
ISSN
0167-9317

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๐Ÿ“œ SIMILAR VOLUMES


Glass transition-related changes in mole
โœ Yoshioka, Sumie (author);Aso, Yukio (author) ๐Ÿ“‚ Article ๐Ÿ“… 2005 ๐Ÿ› John Wiley and Sons Inc. ๐ŸŒ English โš– 247 KB

The purpose of this study was to explore why changes in the molecular mobility associated with glass transition, the timescale of which is on the order of 100 s, can be detected by measuring the nuclear magnetic resonance relaxation times that reflect molecular motions on the order of 10 kHz and 1 M