In situ control of the growth of GaAs / GaAlAs structures in a metalorganic vapour phase epitaxy reactor by laser reflectometry

✍ Scribed by R. Azoulay; Y. Raffle; R. Kuszelewicz; G. Le Roux; L. Dugrand; J.C. Michel

• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 542 KB
• Volume: 145
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(94)91029-4