✦ LIBER ✦

In situ analyses on negative ions in the sputtering process to deposit Al-doped ZnO films

✍ Scribed by Tsukamoto, Naoki; Watanabe, Daisuke; Saito, Motoaki; Sato, Yasushi; Oka, Nobuto; Shigesato, Yuzo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

In-situ analyses on the reactive sputter

✍ Naoki Tsukamoto; Nobuto Oka; Yuzo Shigesato 📂 Article 📅 2012 🏛 Elsevier Science 🌐 English ⚖ 812 KB

Effects of in situ annealing on the prop

✍ Deok-Kyu Kim,Choon-Bae Park 📂 Article 📅 2014 🏛 Springer US 🌐 English ⚖ 797 KB

Erratum to: Effects of in situ annealing

✍ Kim, Deok-Kyu; Park, Choon-Bae 📂 Article 📅 2014 🏛 Springer US 🌐 English ⚖ 99 KB

Low temperature rf-sputtered In and Al c

✍ Park, Sang-Uk; Koh, Jung-Hyuk 📂 Article 📅 2014 🏛 Elsevier Science 🌐 English ⚖ 832 KB

In situ and ex situ investigation on the

✍ Tao Chen; Shu-Yi Liu; Qi Xie; Christophe Detavernier; R. L. Van Meirhaeghe; Xin- 📂 Article 📅 2009 🏛 Springer US 🌐 English ⚖ 546 KB

In situ spectroscopic ellipsometry to mo

✍ Logothetidis, S.; Alexandrou, I.; Papadopoulos, A. 📂 Article 📅 1995 🏛 American Institute of Physics 🌐 English ⚖ 926 KB