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In-plane rotary comb-drive actuator for a variable optical attenuator

✍ Scribed by Huang, Jing-Yi

Book ID: 120995666
Publisher: The International Society for Optical Engineering
Year: 2008
Tongue: English
Weight: 945 KB
Volume: 7
Category: Article
ISSN: 1932-5150
DOI: 10.1117/1.3013547

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