Large rotation actuated by in-plane rotary comb-drives with serpentine spring suspension

✍ Scribed by Yeh, J Andrew; Chen, Chi-Nung; Lui, Yen-Seng

• Book ID: 120995510
• Publisher: Institute of Physics
• Year: 2004
• Tongue: English
• Weight: 217 KB
• Volume: 15
• Category: Article
• ISSN: 0960-1317
• DOI: 10.1088/0960-1317/15/1/028