Role of Hydrogen in the CVD of Wide Band
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Stephen J. Pearton; Alexander Y. Polyakov
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Article
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2010
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John Wiley and Sons
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English
β 386 KB
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Hydrogen is an important component of the gas-phase growth chemistry for GaN, which is typically based on NH 3 and (CH 3 ) 3 Ga, and also the processing environment for subsequent device fabrication (e.g., SiH 4 for dielectric deposition, NH 3 or H 2 annealing ambients), and is found to readily perm