Hydrogen is an important component of the gas-phase growth chemistry for GaN, which is typically based on NH 3 and (CH 3 ) 3 Ga, and also the processing environment for subsequent device fabrication (e.g., SiH 4 for dielectric deposition, NH 3 or H 2 annealing ambients), and is found to readily perm
ChemInform Abstract: Role of Hydrogen in the CVD of Wide Bandgap Nitride Semiconductors
β Scribed by Stephen J. Pearton; Alexander Y. Polyakov
- Publisher
- John Wiley and Sons
- Year
- 2011
- Weight
- 18 KB
- Volume
- 42
- Category
- Article
- ISSN
- 0931-7597
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## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a βFull Textβ option. The original article is trackable v
## Abstract ChemInform is a weekly Abstracting Service, delivering concise information at a glance that was extracted from about 100 leading journals. To access a ChemInform Abstract of an article which was published elsewhere, please select a βFull Textβ option. The original article is trackable v