Impurity gettering effects in separation-by-implanted-oxygen (SIMOX) wafers: what getters what, where and how

✍ Scribed by R.A. Yankov; J.R. Kaschny; P.F.P. Fichtner; A. Mücklich; U. Kreißig; W. Skorupa

• Book ID: 104306406
• Publisher: Elsevier Science
• Year: 1997
• Tongue: English
• Weight: 313 KB
• Volume: 36
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/s0167-9317(97)00032-4