✦ LIBER ✦
MeV-boron implanted layer, oxygen precipitates and poly-silicon back side combined in one silicon wafer: at what defect will Cu and Ni be gettered?
✍ Scribed by R. Hölzl; L. Fabry; K.-J. Range; R. Pech
- Publisher
- Springer
- Year
- 2002
- Tongue
- English
- Weight
- 243 KB
- Volume
- 74
- Category
- Article
- ISSN
- 1432-0630
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