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Impurity Behavior of High Purity SiC Powder during SiC Crystal Growth

✍ Scribed by Shin, Dong Geun; Son, Hae Rok; Heo, Sun; Kim, Byung Sook; Han, Jung Eun; Min, Kyung Suk; Lee, Dong Hwa


Book ID
126153974
Publisher
Trans Tech Publications, Ltd.
Year
2014
Tongue
English
Weight
614 KB
Volume
778-780
Category
Article
ISSN
1662-9752

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Behavior of phosphorus impurities during
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## Abstract The effect of evaporation of phosphorus impurities from the melt is investigated as well as the contaminating effect of quartz glass crucibles on residual content and distribution of this impurities by length of high‐purity germanium single crystals. The residual content of phosphorus i