Improving the sensitivity and line edge roughness in inorganic positive electron beam resist

✍ Scribed by Kenta Ogino; Jun Taniguchi; Shin-ichi Satake; Keisuke Yamamoto; Yoshiaki Ishii; Kiyoshi Ishikawa

• Publisher: Elsevier Science
• Year: 2007
• Tongue: English
• Weight: 885 KB
• Volume: 84
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/j.mee.2007.01.144