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Improving the electrical and optical properties of DC-sputtered ZnO:Al by thermal post deposition treatments

✍ Scribed by Mark Wimmer; Florian Ruske; Simone Scherf; Bernd Rech

Book ID
113936982
Publisher
Elsevier Science
Year
2012
Tongue
English
Weight
561 KB
Volume
520
Category
Article
ISSN
0040-6090

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✍ GuillΓ©n, C. ;Herrero, J. πŸ“‚ Article πŸ“… 2009 πŸ› John Wiley and Sons 🌐 English βš– 493 KB

## Abstract Transparent and conductive Al‐doped ZnO (AZO) films with thickness between 0.2 and 1.1 ΞΌm were deposited by sputtering at room temperature on glass and polyethylene terephthalate (PET) substrates. All films were polycrystalline with average crystallite size increasing when the film thic