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Improving the efficiency of gasdynamic windows for electron beam extraction

โœ Scribed by L. N. Orlikov; E. V. Chikin

Book ID
105000639
Publisher
SP MAIK Nauka/Interperiodica
Year
1985
Tongue
English
Weight
354 KB
Volume
26
Category
Article
ISSN
0021-8944

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In the electron beam testing of integrated circuits, local transverse electric fields cause error to voltage measurements. Presently, the solution is to place a i-5 kV voltage extraction electrode a few millimetres above the specimen. An alternative method is to use a micro-extraction electrode that