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Improvement of the crystallinity of GaAs epitaxial layers grown on Si substrates assisted by electron beam irradiation

✍ Scribed by T.W. Kang; Y.D. Woo; T.W. Kim


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
341 KB
Volume
279
Category
Article
ISSN
0040-6090

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