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Improvement of measurement accuracy in shadow moiré by considering the influence of harmonics in the moiré profile

✍ Scribed by Arai, Yasuhiko ;Yokozeki, Shunsuke

Book ID
115348113
Publisher
The Optical Society
Year
1999
Tongue
English
Weight
189 KB
Volume
38
Category
Article
ISSN
1559-128X

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## Abstract In the lithographic processes of VLSIs, high setting accuracies between masks and wafer are required. The methods using moiré signals obtained by gratings were found to give very high alignment accuracies. In this paper, influences of the inclination of gratings for the alignment accura