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Improvement of electrical properties of silicon oxide thin film with ultraviolet and organic gas assisted annealings

✍ Scribed by Ito, Takuya; Matumoto, Takuya; Nishioka, Kensuke

Book ID: 123038058
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 707 KB
Volume: 215
Category: Article
ISSN: 0257-8972
DOI: 10.1016/j.surfcoat.2012.09.060

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