Growth and electrical properties of AlxG
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K. Köhler; S. Müller; P. Waltereit; L. Kirste; H. P. Menner; W. Bronner; R. Quay
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Article
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2009
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John Wiley and Sons
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English
⚖ 376 KB
## Abstract High electron mobility transistor material and device properties based on Al~__x__~Ga~1−__x__~N/GaN heterostructures with an Al‐content ranging from 12 to 35% are presented. The Al‐content of the low pressure metal‐organic vapor‐phase epitaxy grown samples on semi‐insulating SiC and sap