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Improvement of Electrical Properties of MOCVD Grown AlxGa1—xN/GaN Heterostructure with Isoelectronic Al-Doped Channel

✍ Scribed by Jae-Hoon Lee; Jong-Hyun Kim; Sung-Bum Bae; Kyu-Suk Lee; Jae-Seung Lee; Jong-Wook Kim; Sung-Ho Hahm; Jung-Hee Lee


Book ID
104556448
Publisher
John Wiley and Sons
Year
2003
Tongue
English
Weight
123 KB
Volume
0
Category
Article
ISSN
1862-6351

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## Abstract High electron mobility transistor material and device properties based on Al~__x__~Ga~1−__x__~N/GaN heterostructures with an Al‐content ranging from 12 to 35% are presented. The Al‐content of the low pressure metal‐organic vapor‐phase epitaxy grown samples on semi‐insulating SiC and sap