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Improvement of detector fabrication by the planar process

✍ Scribed by J. Kemmer


Publisher
Elsevier Science
Year
1984
Tongue
English
Weight
359 KB
Volume
226
Category
Article
ISSN
0168-9002

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We report on JFET devices fabricated on high-resistivity silicon with a radiation detector technology. The problems affecting previous versions of these devices have been thoroughly investigated and solved by developing an improved fabrication process, which allows for a sizeable enhancement in the